Micronova Centre for Micro- and Nanotechnology
Micronova, is a unique center for the design, development and fabrication of micro- and nanosystems. Micronova is also an official National Research Infrastructure since 2008.
Micronova's expert areas of applications include sensors based on microelectromechanical systems (MEMS), optical and wireless sensors, wireless communications and photonics systems, biosensors and fluidistics, nano and quantum devices, and millimeter wave and optical instruments for space applications.
Micronova's modern facilities, completed in 2002, include 2600 m2 of cleanrooms and processing lines for silicon BiCMOS, MEMS, III-V optoelectronics and thin film devices. In addition, Micronova houses extensive laboratories for electrical and optical measurements and various types of materials characterisation.
About 360 researcher work at Micronova from VTT, Aalto University and from several companies. Micronova contains all parts of the micro-nano innovation chain, from developing basic research and technologies to prototype development, and small scale manufacturing.
Additional information on Micronova